Research
CXRO conducts world-leading research in EUV and X-ray science, spanning lithography, materials characterization, magnetism, and advanced imaging.
EUV Lithography Science
Advancing the science of extreme ultraviolet lithography for next-generation semiconductor patterning.
Microelectronics
Exploring novel materials and processes for advanced microelectronic devices and interconnects.
X-Ray Microscopy & Nanomagnetism
Developing X-ray microscopy for high-resolution imaging and studying nanoscale magnetic structures and ultrafast spin dynamics.