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EUV Lithography Soft X-ray Science Scientific Instrumentation Microelectronics Nanomagnetism
DOE Projects
ANGEL FlexBrain CHiPPS Nanohybrid
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MET5 SHARP Nanofabrication
Reflectometry / Scatterometry Optical Coatings Engineering Resist FundamentalsPES / TEY / FTIR / EAL RSoXS
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Contact

EUREKA

EUREKA is an industry-sponsored research project at CXRO. More details coming soon.

Center for X-Ray Optics · Lawrence Berkeley National Laboratory