CXRO's Qi Zhang wins FY26 Early Career LDRD
Dr. Qi Zhang was awarded an early career LDRD for her proposal titled "Manipulating materials and their properties within confined geometry using advanced nanofabrication methodologies."
Center for X-Ray Optics
About CXROThe Center for X-Ray Optics (CXRO) develops state-of-the-art EUV and X-ray technologies that push the boundaries of microelectronics and scientific instrumentation. We focus on foundational, high-impact research aligned with national priorities—delivering breakthrough solutions directly usable by industry.
X-Ray Database
Comprehensive database of X-ray optical constants and interactions with matter.
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EUV Lithography
Advancing extreme ultraviolet lithography for next-generation semiconductor manufacturing.
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Soft X-ray Science
X-ray microscopy, spectroscopy, and magnetic imaging at the nanoscale.
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Scientific Instrumentation
Precision-engineered EUV and X-ray instruments for research and industry.
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Microelectronics
Enabling the future of microelectronics through novel materials and metrology.
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People
Meet the scientists and engineers driving innovation at CXRO.
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Expert Interview: Bruno La Fontaine on Chip Manufacturing Advances at the ALS
In this 7-minute audio interview, listen as Bruno La Fontaine, director of the Center for X-Ray Optics (CXRO), discusses how scientists at CXRO and the Advanced Light Source helped pioneer a revolutionary approach to making microchips called extreme ultraviolet lithography.
MET team spotlight in lab Microelectronics article: Article Microelectronics Compute This: Six Ways Berkeley Lab is Shaping the Future of Microelectronics
The CXRO Microfield Exposure Tool (MET5) team was recently featured in lab Microelectronics article: Article Microelectronics Compute This: Six Ways Berkeley Lab is Shaping the Future of Microelectronics