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The Center for X-Ray Optics is a multi-disciplined research group within Lawrence Berkeley National Laboratory's (LBNL) Materials Sciences Division (MSD). Notice to users.

The world standard for EUV and
x-ray reflectance measurements.

The CXRO Reflectometer

"Mirrors and detectors are the foundation of soft
x-ray science.
We routinely measure the reflectivity and scattering properties of the most advanced x-ray and EUV optics in the world."

Eric Gullikson,
CXRO Reflectometer Principal Investigator

Photo of Eric Gullikson, CXRO Staff Scientist
Entineering test station optics

A worldwide standard.

The CXRO Reflectometer serves as a worldwide reference standard. Its high accuracy and un- rivaled precision enable it to characterize the fundamental optical properties of materials, the quality of optical elements, the efficiency of grating spectrometers, the scattering properties of ultra-smooth surfaces, and the sensitivity of detectors, at EUV and soft x-ray wavelengths.

ALS Beamline 6.3.2 layout

Schematic of ALS Beamline 6.3.2, the CXRO Reflectometer

Beamline specifications

  • Wavelength precision: 0.007%
  • Wavelength uncertainty: 0.0123%
  • Reflectance precision: 0.08%
  • Reflectance uncertainty: 0.08%
  • Spectral purity: 99.98%
  • Dynamic range: 1010

Endstation specifications

  • 10 μm x 300 μm beam size
  • 10 μm positioning precision
  • Angular precision: 0.01 deg
  • 6 degrees of freedom
  • Sample size up to 200 mm

The Reflectometer team.

Photo of Eric Gullikson

Eric Gullikson

Staff Scientist
Photo of Sunling Yang

Sunling Yang

Research Associate