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Beamline 12.0.1: EUV Interferometry

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Beamline 12.0.1 provides an endstation for EUV Lithography which is heavily used by many industrial partners in the semiconductor industry.

‹ Beamline 11.3.2: EUV Mask Inspection up Beamline 12.0.2.1: Coherent Soft X-Rays ›

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